WebApr 13, 2005 · Ethylene diamine–pyrocatechol water was purchased from the Transene Company, Inc. with a suggested silicon etching rate of 80 μm/h at 115 °C. The KOH etchant solution was synthesized from KOH crystal and water to a concentration of 20 wt% and operating at a temperature of 95 °C. Download : Download full-size image Fig. 1. WebAug 1, 1984 · Bogh A 1971 Ethylene diamine-pyrocatechol-water mixture shows etching anomaly in boron-doped silicon J. Electrochem.Soc. 118 401 Crossref Google Scholar. Greenwood J C 1969 Ethylene diamine-catechol-water mixture shows preperential etching of p-n junction J. Electrochem.Soc. 116 1326 Crossref Google Scholar. Greenwood J C …
Ethylenediamine pyrocatechol - Wikipedia
WebMay 1, 2007 · Toyota Technological Institute Show all 6 authors Abstract Etching characteristics of hexagonal and triangular cavities on a lang1 1 1rang-oriented silicon wafer in the etchant of ethylene... Webmay be accomplished using KOH, ethylene diamine pyrocatechol (EDP), or tet-ramethyl ammonium hydroxide (TMAH). Alternatively, researchers have used a dry etch release in a XeF 2 plasma [2] or in a SF 6:O 2 plasma [3] to prevent prob-lems with sticking during release. The contact-cut and metal-etch steps in the foundry CMOS process are tai- clerk of court durham county nc
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WebJun 21, 1996 · Typically, the piezoelectric material is a sputter-deposited film of aluminum nitride or zinc oxide. Processing techniques such as the use of KOH or ethylene diamine pyrocatechol (EDP) to etch silicon or the use of sacrificial materials to form "air gap" structures (3) are needed to isolate the acoustic cavity from the underlying substrate. WebFeb 1, 1971 · Ethylene Diamine‐Pyrocatechol‐Water Mixture Shows Etching Anomaly in Boron‐Doped Silicon. A. Bohg 1 © 1971 ECS - The Electrochemical Society Journal of … WebPreviously in our group, T. Tang and R. Gutierrez presented the results of their extensive use of ethylene diamine pyrocatechol (EDP) to deep-etch the inertial- sensitive r4esonators and… Other... bluffs of burnsville apartments mn